Technologies like integrated signal distributing, processing, and sensing networks require basic optical elements such as waveguides, splitters, gratings, and optical switches to be miniaturized. This poses challenges, especially for curved elements such as bends and ring resonators, which require an especially high resolution and lower sidewall roughness.
There are a number of methods to achieve subwavelength high-resolution manufacturing, though they tend to be costly, complex, and time-consuming. Nanoimprint lithography is promising as an approach to efficient high-resolution manufacturing, but it requires high-quality master stamps often produced with electron beam lithography. Read More